H. Dong, L. Zhang, K. Huang, C. Lian, Y. Liao*, X. Zhou, Z. Zhang, E.I. Kauppinen*, Z.-S. Wu

Advanced Functional Materials, 2023, 33.

DOI: 10.1002/adfm.202301103 [PDF]

Micro-supercapacitors (MSCs) have been promising energy storage units for powering flexible and portable electronics. However, the conventional solution processing microfabrication methods for MSCs require tedious dispersion and a long time for the post-solvent treatment. Herein, we report a liquid-free  and direct patterning method by floating catalyst chemical vapor deposition (FCCVD) for constructing MSCs.  The nitrogen-doped single-walled carbon nanotubes (N-SWCNTs) with tunable nitrogen content by FCCVD are directly deposited on a patterned filter with designable patterns and dry-transferred on versatile substrates without solvent treatment. The obtained MSCs deliver excellent areal capacitance of 3.6 mF cm-2 and volumetric capacitance of 98.6 F cm-3 at a scan rate of 5 mV s-1, along with excellent long-term cycle stability. Furthermore, our MSCs show good performance uniformity, which can be readily integrated via connection in parallel or series to deliver a stable high voltage (4 V with five serially-connected cells) and large capacitance (5.1 mF with five parallelly-connected cells) at a scan rate of 100 mV s-1, enabling powering the light emitting displays. Therefore, this method blazes the trail of directly preparing flexible, shape-customizable and high-performance MSCs.